NSF award 2511158 · Johns Hopkins University

Equipment: MRI: Track 2 Acquisition of an Extreme Ultra Violet (EUV) Resist Flood Exposure Tool

Final report due

29 December 2028

in 803 days · The award ends on 31 August 2028.

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award ending 2028-08-31 · Research.gov
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Extension request17 Jul 2028in 638 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “at least 45 days prior to the end date”
No-cost extension notice21 Aug 2028in 673 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “at least ten calendar days prior to the end date”
Final report due29 Dec 2028in 803 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “no later than 120-days following the end date of the award”
Project outcomes report due29 Dec 2028in 803 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “no later than 120 days following the end date”
Award is closed out29 Dec 2028in 803 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “financially closed out 120 days after their expiration date”

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NSF rules say the final report is due no later than 120 days after that.
So the final report is due by 29 December 2028.

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Award card

Award number: 2511158
Period of support: 1 Sep 2025 – 31 Aug 2028
Amount: $3,540,000
Awardee: Johns Hopkins University, Baltimore, MD
Program: Major Research Instrumentation
Directorate: ENG

Abstract

Modern life depends on powerful computer chips that run everything from smartphones to medical devices. Making these chips requires creating incredibly small features, far tinier than the width of a human hair. To achieve this, the electronics industry now uses a special kind of light called extreme ultraviolet (EUV). This new technology allows the production of smaller, faster, and more efficient chips. However, a…

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