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NSF award 2511879 · University of California-Los Angeles

ECLIPSE-CHIPS: GOALI: Diagnostics and Physics of Plasmas in Modern Industrial CCP Etch Tools

Final report due

29 December 2028

in 803 days · The award ends on 31 August 2028.

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Dates this award owes

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  • Decide about an extension3 May 2028in 563 days

    award ending 2028-08-31 · Research.gov

  • Extension request17 Jul 2028in 638 days

    award ending 2028-08-31 · Research.gov

  • No-cost extension notice21 Aug 2028in 673 days

    award ending 2028-08-31 · Research.gov

  • Final report due29 Dec 2028in 803 days

    award ending 2028-08-31 · Research.gov

  • Project outcomes report due29 Dec 2028in 803 days

    award ending 2028-08-31 · Research.gov

  • Award is closed out29 Dec 2028in 803 days

    award ending 2028-08-31 · Research.gov

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How we got this date

  1. NSF lists this award's end date as 31 August 2028.
  2. NSF rules say the final report is due no later than 120 days after that.
  3. So the final report is due by 29 December 2028.

Read the rule on Research.gov

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Award card

Award number
2511879
Period of support
1 Sep 2025 – 31 Aug 2028
Amount
$600,000
Awardee
University of California-Los Angeles, LOS Angeles, CA
Program
OFFICE OF MULTIDISCIPLINARY AC
Directorate
MPS

Abstract

This award is made in response to Dear Colleague Letter 24-130, as part of the ECosystem for Leading Innovation in Plasma Science and Engineering (ECLIPSE) interdisciplinary program. The award supports a joint Grant Opportunities for Academic Liaison with Industry (GOALI) effort by the University of California - Los Angeles and Lam Research Corporation that includes a collaboration with Sandia National Laboratories.…

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