NSF award 2512131 · Princeton University

ECLIPSE-CHIPS: High-Fluence Coherent EUV Light from Ultraintense Laser-Plasma Interactions for Advanced Nanolithography and Metrology

Final report due

29 December 2028

in 803 days · The award ends on 31 August 2028.

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award ending 2028-08-31 · Research.gov
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Extension request17 Jul 2028in 638 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “at least 45 days prior to the end date”
No-cost extension notice21 Aug 2028in 673 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “at least ten calendar days prior to the end date”
Final report due29 Dec 2028in 803 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “no later than 120-days following the end date of the award”
Project outcomes report due29 Dec 2028in 803 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “no later than 120 days following the end date”
Award is closed out29 Dec 2028in 803 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “financially closed out 120 days after their expiration date”

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NSF lists this award's end date as 31 August 2028.
NSF rules say the final report is due no later than 120 days after that.
So the final report is due by 29 December 2028.

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Award card

Award number: 2512131
Period of support: 1 Sep 2025 – 31 Aug 2028
Amount: $640,000
Awardee: Princeton University, Princeton, NJ
Program: OFFICE OF MULTIDISCIPLINARY AC, CSCS: Circuits and Systems for
Directorate: MPS

Abstract

This award is made in response to Dear Colleague Letter 24-130, as part of the ECosystem for Leading Innovation in Plasma Science and Engineering (ECLIPSE) interdisciplinary program. Extreme ultraviolet (EUV) light is crucial for creating faster and smaller electronic devices, such as the microchips in smartphones and computers. By producing more focused and more powerful EUV beams with shorter wavelengths, this…

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