NSF award 2512062 · University of California-Riverside

ECLIPSE-CHIPS: Plasma-Produced Materials to Investigate Laser-Produced Plasmas for Microelectronics Manufacturing

Final report due

29 December 2028

in 803 days · The award ends on 31 August 2028.

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Extension request17 Jul 2028in 638 days
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PAPPG 24-1: “at least 45 days prior to the end date”
No-cost extension notice21 Aug 2028in 673 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “at least ten calendar days prior to the end date”
Final report due29 Dec 2028in 803 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “no later than 120-days following the end date of the award”
Project outcomes report due29 Dec 2028in 803 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “no later than 120 days following the end date”
Award is closed out29 Dec 2028in 803 days
award ending 2028-08-31 · Research.gov
PAPPG 24-1: “financially closed out 120 days after their expiration date”

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NSF lists this award's end date as 31 August 2028.
NSF rules say the final report is due no later than 120 days after that.
So the final report is due by 29 December 2028.

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Award card

Award number: 2512062
Period of support: 1 Sep 2025 – 31 Aug 2028
Amount: $532,000
Awardee: University of California-Riverside, Riverside, CA
Program: AM-Advanced Manufacturing
Directorate: ENG

Abstract

This award is made in response to Dear Colleague Letter 24-130, as part of the ECosystem for Leading Innovation in Plasma Science and Engineering (ECLIPSE) interdisciplinary program. This grant supports the research looking to advance photolithography, a technology that is critical for the large-scale manufacturing of microelectronics. Photolithography is used to define the exceedingly small integrated circuits that…

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